Sweeping the lean angle can make improvements to movie thickness uniformity and sidewall protection when also steering clear of large Strength-reflected neutral species for significant processes.
In-situ optical monitoring and Management is out there by means of Angstrom’s optical monitoring & Handle bundle.
An optional cryogenic pump increases base pressure and pumping speed and can be isolated through the chamber all through reactive processes with oxygen.
The size, posture, and equipment ratio of each World are optimized to deliver the very best doable film thickness uniformity.
Our Reticle® ion beam sputter deposition programs are intended and engineered to develop exact optical movies of the highest purity, density, and security.
Variable angle phases permit for incredibly powerful thin film methods. Nonetheless, among its most significant difficulties is reproducibility. The substrate is usually established at an incredibly oblique angle in relation to the supply, and also the movies are quite sensitive towards the precision of this angle.
Angstrom Engineering® layouts and engineers Every single Reticle® System to supply our associates within the optics community the ability to produce the films they want with outstanding purity, density, and uniformity, all in the very repeatable and automatic trend.
Our exclusive structure permits direct or indirect checking from the variable angle phase, reducing the need for tooling factors or maybe a witness glass changer. Learn more concerning the Optical Monitoring & Regulate package deal right here.
IBSD processes might also Tungsten materials for electronics employ a secondary ion supply for substrate cleaning and energetic assist, substrate heating for reactive deposition, and in-situ optical checking or ellipsometry for crucial layer thickness termination.
All regular Reticle® platforms include an additional gridless conclude-Corridor ion source with hollow cathode neutralizer.
The deposition ion supply is directed toward a material target which has been optimized in each size and posture to the needed deposition geometry.
Self-aligned ion optics are configured specifically for the specified deposition needs and geometry of your respective system.
Angstrom Engineering’s Reticle® units provide a convert-vital Resolution for people aiming to realize any optical design right into a substantial-effectiveness movie.
Dynamic uniformity shaping is accomplished employing a flux correction defend between the deposition resource and the substrate.
Thoughtful style of your ion beam focusing optics confines the beam solely to the area on the concentrate on, doing away with any danger of contamination.